• RecordNumber
    43268
  • LC Class
    TJ
  • LC Number
    1191.5
  • LC CutterNumber
    .M5526
  • Dewey Class
    621
  • Dewey Date
    .36
  • Author

    Minh, Phan Ngoc

  • Title

    Fabrication of silicon microprobes for optical near-field applications

  • Author Statement
    Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi
  • Publication
    CRC Press
  • Publication Year
    c2002
  • Collation
    180 p.:ill.;25 cm
  • Subject

    Micromachining,Silicon,Near-field microscopy,Microprobe analysis

  • ADDED ENTRIES
    Takahito, Ono
  • Holding Info.
    0849311543
  • Original By
    82/03
  • DocumentNumber
    52617
  • Biblography
    Includes bibliographical references and index
  • BL
    BL