RecordNumber
43268
LC Class
TJ
LC Number
1191.5
LC CutterNumber
.M5526
Dewey Class
621
Dewey Date
.36
Author
Minh, Phan Ngoc
Title
Fabrication of silicon microprobes for optical near-field applications
Author Statement
Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi
Publication
CRC Press
Publication Year
c2002
Collation
180 p.:ill.;25 cm
Subject
Micromachining,Silicon,Near-field microscopy,Microprobe analysis
ADDED ENTRIES
Takahito, Ono
Holding Info.
0849311543
Original By
82/03
DocumentNumber
52617
Biblography
Includes bibliographical references and index
BL
BL