Title :
MEMS mechanical sensors
Author Statement :
Stephen Beeby ... [et al.]
Publication :
Artech House
Collation :
x, 269 p. ill. 26 cm.
Series :
Artech House microelectromechanical system series
Subject :
Microelectromechanical systems,Detectors
ADDED ENTRIES :
Beeby, Stephen
Biblography :
Includes bibliographical references and index
