Title :
ULSI semiconductor technology Atlas
Author Statement :
Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu
Collation :
xii, 666 p. ill. 26 cm.
Subject :
Integrated circuits- Ultra large scale integration- Atlas,Electron microscopy
ADDED ENTRIES :
Sheng, George T. T
Biblography :
Includes bibliographical references and indexes
