Author Statement :
edited by Mohamed Gad-El-Hak
Publication :
CRC/Taylor & Francis
Collation :
1 v. (various p.) : ill. ; 26 cm
Series :
Mechanical engineering series
Subject :
Microelectromechanical systems , Microelectronics , Nanotechnology
ADDED ENTRIES :
Gad-el-Hak, Mohamed
SubTitle :
introduction and fundamentals
Index :
Includes bibliographical references and index
