• RecordNumber
    49058
  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .S46
  • LC Date
    2001
  • Author

    Senturia, Stephen D.

  • Birth-Death
    1940-
  • Title

    Microsystem design

  • Author Statement
    Stephen D. Senturia
  • Publication
    Kluwer Academic Publishers
  • Publication Year
    2001
  • Collation
    xxvi, 689 p.: ill., 24 cm
  • Subject

    Microelectromechanical systems , System design , Microelectronics

  • وارد كنندة اطلاعات
    aghaee
  • تاريخ ورود اطلاعات
    1389/01/28
  • Index
    Includes bibliographical references (p. [665]-676) and index.