• RecordNumber
    49913
  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .F73
  • LC Date
    2010
  • Author

    Franssila, Sami

  • Title

    Introduction to microfabrication

  • Author Statement
    Sami Franssila
  • Edition
    2nd ed
  • Publication
    John Wiley & Sons
  • Publication Year
    2010
  • Collation
    xiv, 518 p.: ill.
  • Subject

    Microelectromechanical systems. , Electronic apparatus and appliances. , Microfabrication.

  • ADDED ENTRIES
    TI
  • وارد كنندة اطلاعات
    aghaee
  • تاريخ ورود اطلاعات
    1390/06/19
  • Index
    Includes bibliographical references and index