Author Statement :
edited by Cornelius T. Leondes
Collation :
5 v.: ill., 25 cm
Notes :
v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS.
Subject :
Microelectromechanical systems -- Design and construction , Nanotechnology
ADDED ENTRIES :
AU Leondes, Cornelius T
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1390/06/28
SubTitle :
handbook techniques and applications
Index :
Includes bibliographical references and index
