Title :
Nanoparticle engineering for chemical-mechanical planarization
Author Statement :
Ungyu Paik, Jea-Gun Park
Publication :
Boca Raton, FL CRC Press/Taylor & Francis Group
Collation :
xiii, 191 p., [14] p. of plates: ill., (some col.), 25 cm.
Subject :
Chemical mechanical planarization , Nanoparticles , Nanoelectronics
ADDED ENTRIES :
AU Park, Jea-Gun , TI
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1390/10/21
SubTitle :
fabrication of next-generation nanodevices
Index :
Includes bibliographical references and index
