• RecordNumber
    50260
  • LC Class
    TK
  • LC Number
    7874.84
  • LC CutterNumber
    .P35
  • LC Date
    2009
  • Author

    Paik, Ungyu

  • Title

    Nanoparticle engineering for chemical-mechanical planarization

  • Author Statement
    Ungyu Paik, Jea-Gun Park
  • Publication
    Boca Raton, FL CRC Press/Taylor & Francis Group
  • Publication Year
    c2009
  • Collation
    xiii, 191 p., [14] p. of plates: ill., (some col.), 25 cm.
  • Subject

    Chemical mechanical planarization , Nanoparticles , Nanoelectronics

  • ADDED ENTRIES
    AU Park, Jea-Gun , TI
  • وارد كنندة اطلاعات
    aghaee
  • تاريخ ورود اطلاعات
    1390/10/21
  • SubTitle
    fabrication of next-generation nanodevices
  • Index
    Includes bibliographical references and index
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=50260&Field=0&DTC=100