• RecordNumber
    51850
  • LC Class
    TJ
  • LC Number
    1191.5
  • LC CutterNumber
    .G38
  • LC Date
    2015
  • Author

    Gatzen, Hans H.

  • Title

    Micro an​d nano fabrication

  • Author Statement
    Hans H. Gatzen, Volker Saile, Jürg Leuthold ; with a foreword an​d introduction by Richard S. Muller
  • Publication
    Berlin Springer
  • Publication Year
    2015
  • Collation
    xxvi, 519 p. :ill. ;24 cm.
  • Subject

    Microfabrication , Microelectromechanical systems , Nanostructured materials , Nanomanufacturing

  • ADDED ENTRIES
    AU Saile, Volker , AU Leuthold, Jurg , AU Muller, Richard S. , TI
  • وارد كنندة اطلاعات
    ghasemi
  • SubTitle
    tools an​d processes
  • Biblography
    Includes bibliographical references an​d index
  • تاريخ ورود اطلاعات
    1395/03/23
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=51850&Field=0&DTC=100