Title :
Handbook of physical vapor deposition (PVD) processing
Author Statement :
by Donald M. Mattox
Publication :
Noyes Publications,
Collation :
xxvii, 917 p. ill. 24 cm.
Subject :
Physical vapor deposition Handbooks, manuals, etc
تاريخ ورود اطلاعات :
1399/07/20
SubTitle :
film formation, adhesion, surface preparation and contamination control
Biblography :
Includes bibliographical references and index.