RecordNumber :
1027
Doc. No. :
754F
Call. No. :
754F
Author :
Richter, F.,Kupfer, H.,Giegengack, H
Title of Article :

Fundamental mechanisms of titanium nitride formation by d.c. magnetron sputtering

Title Of Periodical :
SURFACE AND COATINGS TECHNOLOGY
VolumNumber :
V.54/55
Date :
(1992)
Page :
P.338-342
Indexer :
1378/12
IndexDate :
Ghasemi
اطلاعات ثبت :
GN136780
Link To Document :

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