RecordNumber

2230

Doc. No.

1957F

Call. No.

1957F

Author

Hintermann, H. E

Title of Article

Advances and development in CVD technology

Title Of Periodical

MATERIALS SCIENCE AND ENGINEERING

VolumNumber

V. A209

Date

(1996)

Page

P.366-371

Descriptors

Chemical vapour deposition,Silicon,Diamond coatings

Indexer

80/7

IndexDate

Ghasemi

اطلاعات ثبت

GN141286