RecordNumber :
2230
Doc. No. :
1957F
Call. No. :
1957F
Author :
Hintermann, H. E
Title of Article :

Advances and development in CVD technology

Title Of Periodical :
MATERIALS SCIENCE AND ENGINEERING
VolumNumber :
V. A209
Date :
(1996)
Page :
P.366-371
Descriptors :
Chemical vapour deposition,Silicon,Diamond coatings
Indexer :
80/7
IndexDate :
Ghasemi
اطلاعات ثبت :
GN141286
Link To Document :

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