RecordNumber :
372
Doc. No. :
232F
Call. No. :
232F
Author :
Kewei, Xu,ChenJin, Gao Rensheng
Title of Article :

Thermal effects of residual macrostress and microstrain in plasma-assisted CVD TiN films

Title Of Periodical :
SURFACE AND COATINGS TECHNOLOGY
VolumNumber :
V.58
Date :
(1993)
Page :
P.37-43
Indexer :
1378/8
IndexDate :
Maryam
اطلاعات ثبت :
GN134996
Link To Document :

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