Ultra-high vacuum measurements of the internal stress of PVD titanium films asa function of thickness and its dependence on substrate temperature

RecordNumber :

388

Doc. No. :

248F

Call. No. :

248F

Author :

Title of Article :

Title Of Periodical :

VACUUM

VolumNumber :

V.43,No.5-7

Date :

(1992)

Page :

P.463-465

Indexer :

1378/8

IndexDate :

Maryam

اطلاعات ثبت :

GN135033

Link To Document :