RecordNumber
388
Doc. No.
248F
Call. No.
248F
Author
Schneeweib,H. J.,Abermann, R.
Title of Article
Ultra-high vacuum measurements of the internal stress of PVD titanium films asa function of thickness and its dependence on substrate temperature
Title Of Periodical
VACUUM
VolumNumber
V.43,No.5-7
Date
(1992)
Page
P.463-465
Indexer
1378/8
IndexDate
Maryam
اطلاعات ثبت
GN135033