17158

68 گلپايگان

كارشناسي ارشد

طراحي كاربردي

اصفهان : دانشگاه صنعتي اصفهان

1396

65ص: مصور، جدول، نمودار

1400/11/12

كتابنامه

مهندسي مكانيك

فني مهندسي گلپايگان

1400/11/12

63

به فايل مراجعه شود

Abstract This work investigates the static deflection of the thermal microswitches under thermal actuation. The switch is considered as a bilayer microcantilever and the strain gradient theory is used to model the device. Utilizing the Euler-Bernoulli beam theory, the strain energy for the microbeam is calculated and the equation governing the static behavior of the switch is derived using the principle of minimum total potential energy. To simplify equation of motion, equivalent mechanical properties including equivalent length scale parameters are defined for the bilayer microbeam. To have numerical results, a bilayer microbeam made of aluminum and polysilicon is considered. By solving the equation of motion, the static deflection of the microbeam under thermal actuation is derived and compared with those predicted based on the classical theory and the effects of size-dependency on the mechanical response of the system is investigated. Finally, the optimum value of the thickness of layers which leads to the maximum thermal deflection is obtained.

مسعود رهايي فرد، مهدي مجاهدي